Excimer lamp

An excimer lamp is a special gas discharge lamp that emits ultraviolet (UV) light through excimer molecules (short-lived, bound excimer gases). These lamps are used in applications such as disinfection, lithography, and medical treatments.


How an Excimer Lamp Works

  1. Excimer formation – The lamp contains a noble gas (such as krypton, xenon) or a mixture of a noble gas and a halogen (such as fluorine or chlorine).
  2. Energy pulse – An electrical discharge in the lamp brings the gas molecules into an excited state , creating temporary excimer molecules.
  3. Light emission – When the excimer molecules break down, they emit UV light at a specific wavelength (e.g., 172 nm for xenon excimer lamps or 222 nm for krypton-chlorine).

Key features

Short wavelength UV light – Effective for sterilization and surface cleaning.
No harmful ozone production – Unlike some other UV lamps.
Low operating temperature – Can be used in sensitive applications.
Widely applicable – In both medical and industrial applications.


Applications of Excimer lamps

🦠 Disinfection and Sterilization

  • Kills bacteria, viruses and fungi on surfaces and in the air.
  • Special 222 nm UV-C excimer lamps are safer for human use and are used in hospitals and public spaces.

🔬 Photolithography (Microelectronics)

  • Short-wavelength UV light is used in the production of microchips and semiconductors.

Medical treatments

  • UV therapy for skin diseases such as psoriasis and vitiligo.
  • Applications in eye surgery and wound healing.

🏭 Materials processing and chemical reactions

  • Removing thin layers of material without thermal damage.
  • Accelerating chemical reactions in industrial processes.

Advantages over traditional UV lamps

✔ More efficient and precise in UV radiation
✔ Does not produce ozone (at certain wavelengths)
✔ Can provide safer UV radiation for use in human environments
✔ Long lifespan and low maintenance costs